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1No 1Yes

1exposure functions 1maskless lithography 1non-linear photochemistry 1optimisation 1photoresist

1Fleming, Andrew J. 1Ghalehbeygi, Omid T. 1Routley, Ben S. 1Tayefeh Ghalehbeygi, Omid 1Wills, Adrian G.

1conference paper 1thesis

Date

12017 12018

1Adobe Acrobat PDF

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Full Text

1No 1Yes

1exposure functions 1maskless lithography 1non-linear photochemistry 1optimisation 1photoresist

1Fleming, Andrew J. 1Ghalehbeygi, Omid T. 1Routley, Ben S. 1Tayefeh Ghalehbeygi, Omid 1Wills, Adrian G.

1conference paper 1thesis

Date

12017 12018

1Adobe Acrobat PDF

Title
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Exposure planning for scanning laser lithography

- Tayefeh Ghalehbeygi, Omid

Creator: Tayefeh Ghalehbeygi, Omid
Resource Type: thesis
Date: 2018

Exposure planning for scanning laser lithography

Creator: Tayefeh Ghalehbeygi, Omid
Resource Type: thesis
Date: 2018

Experimental scanning laser lithography with exposure optimization

- Fleming, Andrew J., Ghalehbeygi, Omid T., Routley, Ben S., Wills, Adrian G.

Creator: Fleming, Andrew J. , Ghalehbeygi, Omid T. , Routley, Ben S. , Wills, Adrian G.
Resource Type: conference paper
Date: 2017

1

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